Silicon Piezoresistive
Relative Pressure Sensor
KPY 32-RK
Features
• Low pressure and temperature hysteresis
• Fast response
• High sensitivity and linearity
• Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
• Provided for further fabrication, protection cap
Similar to TO-8
Type
KPY 32-RK
Symbol
P0 … PN
Pressure Unit
Range
0 … 0.06 bar
Pin Configuration
1
− VIN
2
− VOUT
3
Not connected
4
Temperature sensor
(typ. R25 = 2 kΩ)
5
Temperature sensor
6
Shielding, to be connected
to + VIN
7
+ VIN
8
+ VOUT
Ordering Code
Q62705-K266
Data Sheet
1
1999-04-01