MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX12/D
10 kPa
Uncompensated
Silicon Pressure Sensors
The MPX12 series device is a silicon piezoresistive pressure sensor providing a very
accurate and linear voltage output — directly proportional to the applied pressure. This
standard, low cost, uncompensated sensor permits manufacturers to design and add
their own external temperature compensating and signal conditioning networks.
Compensation techniques are simplified because of the predictability of Motorola’s single
element strain gauge design.
Features
• Low Cost
• Patented Silicon Shear Stress Strain Gauge Design
• Ratiometric to Supply Voltage
• Easy to Use Chip Carrier Package Options
• Differential and Gauge Options
Application Examples
• Air Movement Control
• Environmental Control Systems
• Level Indicators
• Leak Detection
• Medical Instrumentation
• Industrial Controls
• Pneumatic Control Systems
• Robotics
Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
PIN 3 + VS
X–ducer
PIN 2
+ Vout
PIN 4
– Vout
PIN 1
Figure 1. Uncompensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
MPX12
SERIES
0 to 10 kPa (0 – 1.45 psi)
35 mV FULL SCALE SPAN
(TYPICAL)
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
DIFFERENTIAL
PORT OPTION
CASE 344C–01, STYLE 1
NOTE: Pin 1 is the notched pin.
PIN NUMBER
1
Gnd
3
VS
2
+Vout
4 –Vout
Senseon and X–ducer are trademarks of Motorola, Inc.
©MMoottoororolal,aInSc.e1n9s97or Device Data
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